• Single
• Duals
  
• Quads
  
• Hightemperature Singles

• Integrated Sensors
• Analog Sensor Modules
• Digital Sensor Modules

• Linear Arrays
• 2D Arrays
• Array Modules
• Application Sets and Imaging

• Single
• Duals and Quads
• Linear Array

• Sensors in TO Packages
• Pirani Application Set

• Surface Micromachining
• Bulk Micromachining
• Mask Processing, Double Side Lithography
• Through Silicon Via

The HEIMANN vacuumsensor series HVS contains new innovative sensor chips in silicon micromachining technology. We can offer both the sensor in a TO-5 housing and the complete micro Pirani vaccuum sensor with standard RS232 interface and display. The silicon batch technology allows miniaturization and low cost high volume manufacturing. The standard measurement range from 10-4 mbar to 100 mbar can be extended to 1000 mbar on special request.