• Single
• Duals
  
• Quads
  
• Hightemperature Singles

• Integrated Sensors
• Analog Sensor Modules
• Digital Sensor Modules

• Linear Arrays
• 2D Arrays
• Array Modules
• Application Sets and Imaging

• Single
• Duals and Quads
• Linear Array

• Sensors in TO Packages
• Pirani Application Set

• Surface Micromachining
• Bulk Micromachining
• Mask Processing, Double Side Lithography
• Through Silicon Via

The Heimann Sensor vacuum sensor is a miniature Pirani-type sensor based on a heated resistor structure on a thin micromachined membrane. The sensor comes in a small metal housing and shows excellent stability. It can be used with small or large volumes and is insensitive to the mounting position.

More Information about Vacuum Sensors